Micromachined SPM probes with sub-100 nm features at tip apex
1999
Details
Title
Micromachined SPM probes with sub-100 nm features at tip apex
Author(s)
Schürmann, G. ; Indermühle, P.-F. ; Staufer, U. ; de Rooij, N. F.
Published in
Surface and Interface Analysis
Volume
27
Pages
299-301
Date
1999
Note
204
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12