Miniaturised flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and SU-8 technologies
2004
Details
Title
Miniaturised flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and SU-8 technologies
Author(s)
Schöning, M. J. ; Näther, N. ; Auger, V. ; Poghossian, A. ; Koudelka-Hep, M.
Published in
10th Int. Meeting on Chemical Sensors
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12