Theoretical and Experimental Investigations on Silicon Single Crystal Resonant Structures.
1989
Details
Title
Theoretical and Experimental Investigations on Silicon Single Crystal Resonant Structures.
Author(s)
BUSER, Rudolf
Advisor(s)
Date
1989
Publisher
Université de Neuchâtel
Note
Jury: B. Hoek (Uni Uppsala), H. Brändle (ABB ASEA), R. Kubli (Mettler), R. Dändliker.
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12