Details
Title
One mask nickel micro-fabricated reed relay
Author(s)
Roth, S. ; Marxer, C. ; Feusier, G. ; de Rooij, N. F.
Published in
MEMS '00 13th Annual International Conference on Micro Electro Mechanical Systems
Pages
176-179
Date
2000
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12