High aspect ratio UV photolithography for electroplated structures
1998
Details
Title
High aspect ratio UV photolithography for electroplated structures
Author(s)
Roth, S. ; Dellmann, L. ; Racine, G.-A. ; de Rooij, N. F.
Published in
Micromechanics Europe '98
Pages
55-58
Date
1998
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12