An Investigation of the Hydration Properties of Chemically Vapour-deposited Silicon Dioxide Films by Means of Ellipsometry
1977
Details
Title
An Investigation of the Hydration Properties of Chemically Vapour-deposited Silicon Dioxide Films by Means of Ellipsometry
Author(s)
de Rooij, N. F. ; Sieverdink, R. J. S. ; Tromp, R. M.
Published in
Thin Solid Films
Volume
47
Pages
211-218
Date
1977
Note
2
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12