Details
Title
NEMS need MEMS
Author(s)
de Rooij, N. F.
Published in
MST Kamingespräche, Mikro-Nano-Integration
Date
2006
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12