Details
Title
Technology and Applications of Micro Electro Mechanical Systems
Author(s)
de Rooij, N. F.
Published in
Hilti Workshop on Microsystems Technology
Date
2004
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12