000138174 001__ 138174
000138174 005__ 20180317092529.0
000138174 037__ $$aCONF
000138174 245__ $$aRole of Universities in Industrialization of MEMS Technology
000138174 260__ $$c2004
000138174 269__ $$a2004
000138174 336__ $$aConference Papers
000138174 700__ $$0243301$$ade Rooij, N. F.$$g104887
000138174 773__ $$tSymposium for Establishment of MEMS Park consortium
000138174 909CO $$ooai:infoscience.tind.io:138174$$pconf
000138174 909C0 $$0252173$$pSAMLAB$$xU10329
000138174 937__ $$aSAMLAB-CONF-2004-050
000138174 973__ $$aOTHER$$rNON-REVIEWED$$sPUBLISHED
000138174 980__ $$aCONF