Details
Title
Microfabrication Technologies for Microsystems
Author(s)
de Rooij, N. F.
Published in
Micromachining and Microfabrication Process Technology III
Series
SPIE Proceedings, 3223
Pages
40058
Date
1997
Publisher
SPIE - The Internat. Society for Optical Engineering
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12