IC-Compatible Fabrication Technologies for Microfabricated Sensors and Actuators
1990
Details
Title
IC-Compatible Fabrication Technologies for Microfabricated Sensors and Actuators
Author(s)
de Rooij, N. F.
Published in
3rd International Forum on ASIC and Transducer Technology
Pages
39-47
Date
1990
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12