Applications of Micromachined Sensors Integrated Micro-Motion Systems : Micromachining
1990
Details
Title
Applications of Micromachined Sensors Integrated Micro-Motion Systems : Micromachining
Author(s)
de Rooij, N. F.
Published in
Control and Applications
Pages
433-462
Date
1990
Note
43
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12