Porous Silicon Sacrificial Layer Technique for the Fabrication of Free Standing Membrane Resonators and Cantilever Arrays
1997
Details
Title
Porous Silicon Sacrificial Layer Technique for the Fabrication of Free Standing Membrane Resonators and Cantilever Arrays
Author(s)
Racine, G.-A. ; Genolet, G. ; Clerc, P.-A. ; Despont, M. ; Vettiger, P. ; de Rooij, N. F.
Published in
Eurosensors XI 11th European Conf. On Solid-State Transducers
Volume
1
Pages
285-288
Date
1997
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12