000138127 001__ 138127
000138127 005__ 20180913055300.0
000138127 037__ $$aCONF
000138127 245__ $$aPorous Silicon Sacrificial Layer Technique for the Fabrication of Free Standing Membrane Resonators and Cantilever Arrays
000138127 260__ $$c1997
000138127 269__ $$a1997
000138127 336__ $$aConference Papers
000138127 700__ $$aRacine, G.-A.
000138127 700__ $$aGenolet, G.
000138127 700__ $$aClerc, P.-A.
000138127 700__ $$aDespont, M.
000138127 700__ $$aVettiger, P.
000138127 700__ $$0243301$$g104887$$ade Rooij, N. F.
000138127 773__ $$j1$$tEurosensors XI 11th European Conf. On Solid-State Transducers$$q285-288
000138127 909C0 $$0252173$$pSAMLAB$$xU10329
000138127 909CO $$pconf$$ooai:infoscience.tind.io:138127
000138127 937__ $$aSAMLAB-CONF-1997-017
000138127 973__ $$rNON-REVIEWED$$sPUBLISHED$$aOTHER
000138127 980__ $$aCONF