Details
Title
Microfabricated probes with integrated functionality for SPM.
Author(s)
INTERMÜHLE, Pierre-François
Advisor(s)
Date
1998
Publisher
Université de Neuchâtel
Note
Jury: H.P. Herzig (IMT-UniNE), U. Staufer (IMT-UniNE), H.F. Siegenthaler (UniBE), P. Vettiger (IBM ZH).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12