Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters
2003
Details
Title
Polysilicon Surface Micromachinig for the Fabrication of Thermally Isolated Micro-Igniters
Author(s)
Pham, P. Q. ; Briand, D. ; de Rooij, N. F.
Published in
Eurosensors XVII
Pages
408-409
Date
2003
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12