Thermal Laser Stimulation For MEMS characterisation and failure analysis from principles to case studies
2005
Details
Title
Thermal Laser Stimulation For MEMS characterisation and failure analysis from principles to case studies
Author(s)
Perdu, P. ; Briand, D. ; Beaudoin, F. ; Lafontan, X.
Published in
5th Round Table on Micro/Nano Technologies for Space
Pages
134-153
Date
2005
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12