A Silicon Micromachined Vibrating Gyroscope with Piezoresistive Detection and Electromagnetic Excitation
1996
Details
Title
A Silicon Micromachined Vibrating Gyroscope with Piezoresistive Detection and Electromagnetic Excitation
Author(s)
Paoletti, F. ; Grétillat, M.-A. ; de Rooij, N. F.
Published in
IEEE Micro Electro Mechanical Systems
Pages
162-167
Date
1996
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12