A Silicon Micromachined Vibrating Gyroscope with Piezoresistive Detection and Electromagnetic Excitation


Published in:
IEEE Micro Electro Mechanical Systems, 162-167
Year:
1996
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


Rate this document:

Rate this document:
1
2
3
 
(Not yet reviewed)