Tilting Out-Of-Plane Platform For Optical Applications
2002
Details
Title
Tilting Out-Of-Plane Platform For Optical Applications
Author(s)
Overstolz, T. ; Clerc, P.-A. ; Gale, M. T. ; Herzig, H. P. ; Niederer, G. ; Noell, W. ; Sachtig, J. ; Thiele, H. ; de Rooij, N. F.
Published in
IEEE/LEOS International Conference on Optical MEMS
Pages
81-82
Date
2002
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Scientific production and competences > STI - School of Engineering > STI Archives > OPT - Optics and Photonics Technology Laboratory
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12