Replication of optical MEMS structures in sol-gel materials
2004
Details
Title
Replication of optical MEMS structures in sol-gel materials
Author(s)
Obi, S. ; Gale, M. T. ; Kuoni, A. ; de Rooij, N. F.
Published in
Microelectronic Engineering
Volume
73-74
Pages
157-160
Date
2004
Note
324
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12