Mounting of micromachined diamond tips and cantilevers
1999
Details
Title
Mounting of micromachined diamond tips and cantilevers
Author(s)
Niedermann, Ph. ; Hänni, W. ; Thurre, S. ; Gjoni, M. ; Perret, A. ; Skinner, N. ; Indermühle, P.-F. ; Staufer, U. ; de Rooij, N. F.
Published in
Surfaces and Interface Analysis
Volume
27
Pages
296-298
Date
1999
Note
202
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12