HRXRD studies on epitaxial SiGe/Ge multi-layers
2007
Details
Title
HRXRD studies on epitaxial SiGe/Ge multi-layers
Author(s)
Neels, A. ; Isella, G. ; von Känel, H. ; Dommann, A.
Published in
Size-Strain Conference SS-IV
Date
2007
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12