Printing meets lithography: soft approaches to high resolution patterning
2001
Details
Title
Printing meets lithography: soft approaches to high resolution patterning
Author(s)
Michel, P. ; Bernard, A. ; Bietsch, A. ; Delamarche, E. ; Geissler, M. ; Juncker, D. ; Kind, H. ; Renault, J.-P. ; Rothuizen, H. ; Schmid, H. ; Schmidt-Winkel, P. ; Stutz, R. ; Wolf, H.
Published in
IBM Journal of Research and Development
Volume
45
Pages
697-719
Date
2001
Note
267
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12