Realization miniaturised low voltage electron beam system for lithography application.
1997
Details
Title
Realization miniaturised low voltage electron beam system for lithography application.
Author(s)
DESPONT, Michel
Advisor(s)
Date
1997
Publisher
Université de Neuchâtel
Note
Jury: H.P. Herzig (IMT-UniNE), P. Vettiger (IBM ZH), P. Chang (IBM ZH), U. Staufer (Uni Bâle).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12