Infoscience

Thesis

Realization miniaturised low voltage electron beam system for lithography application.

    Note:

    Jury: H.P. Herzig (IMT-UniNE), P. Vettiger (IBM ZH), P. Chang (IBM ZH), U. Staufer (Uni Bâle).

    Reference

    • SAMLAB-THESIS-1997-003

    Record created on 2009-05-12, modified on 2016-08-08

Fulltext

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