Micro-opto-mechanical 2x2 switch for single mode fibers based on plasma-etched silicon mirror and electrostatic actuation
1998
Details
Title
Micro-opto-mechanical 2x2 switch for single mode fibers based on plasma-etched silicon mirror and electrostatic actuation
Author(s)
Marxer, C. ; Thio, C. ; de Rooij, N. F. ; Anthamatten, O. ; Bättig, R. ; Valk, B. ; Vogel, P.
Published in
IEEE/LEOS Internat. Conf. on Optical MEMS and their Applications
Pages
233-237
Date
1998
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12