Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications
1997
Details
Title
Vertical Mirrors Fabricated by Deep Reactive Ion Etching for Fiber-Optic Switching Applications
Author(s)
Marxer, C. ; Thio, Ch. ; Grétillat, M.-A. ; de Rooij, N. F. ; Anthamatten, O. ; Bättig, R. ; Valk, B. ; Vogel, P.
Published in
IEEE Journal of Microelectromechanical Systems
Volume
6
Issue
3
Pages
277-285
Date
1997
Note
169
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12