000138013 001__ 138013
000138013 005__ 20180317092527.0
000138013 037__ $$aCONF
000138013 245__ $$aVertical Mirrors Fabricated by Reactive Ion Etching for Fiber Optical Switching Applications
000138013 260__ $$c1997
000138013 269__ $$a1997
000138013 336__ $$aConference Papers
000138013 700__ $$aMarxer, C.
000138013 700__ $$aThio, C.
000138013 700__ $$aGrétillat, M.-A.
000138013 700__ $$aAnthamatten, O.
000138013 700__ $$aBaettig, R.
000138013 700__ $$aValk, B.
000138013 700__ $$aVogel, P.
000138013 700__ $$0243301$$ade Rooij, N. F.$$g104887
000138013 773__ $$q49-56$$tIEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems - MEMS '97
000138013 909CO $$ooai:infoscience.tind.io:138013$$pconf
000138013 909C0 $$0252173$$pSAMLAB$$xU10329
000138013 937__ $$aSAMLAB-CONF-1997-015
000138013 973__ $$aOTHER$$rNON-REVIEWED$$sPUBLISHED
000138013 980__ $$aCONF