Vertical Mirrors Fabricated by Reactive Ion Etching for Fiber Optical Switching Applications
1997
Details
Title
Vertical Mirrors Fabricated by Reactive Ion Etching for Fiber Optical Switching Applications
Author(s)
Marxer, C. ; Thio, C. ; Grétillat, M.-A. ; Anthamatten, O. ; Baettig, R. ; Valk, B. ; Vogel, P. ; de Rooij, N. F.
Published in
IEEE 10th Annual Internat. Workshop on Micro Electro Mechanical Systems - MEMS '97
Pages
49-56
Date
1997
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12