Reliability Considerations for Electrostatic Polysilicon Actuators Using as an Example the REMO-Component
1996
Details
Title
Reliability Considerations for Electrostatic Polysilicon Actuators Using as an Example the REMO-Component
Author(s)
Marxer, C. ; Grétillat, M.-A. ; de Rooij, N. F. ; Baettig, R. ; Anthamatten, O. ; Valk, B. ; Vogel, P.
Published in
Eurosensors X - The 10th European Conference on Solid-State Transducers
Pages
1117-1120
Date
1996
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12