000138004 001__ 138004
000138004 005__ 20180913055258.0
000138004 037__ $$aARTICLE
000138004 245__ $$aReliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component
000138004 260__ $$c1997
000138004 269__ $$a1997
000138004 336__ $$aJournal Articles
000138004 500__ $$a170
000138004 700__ $$aMarxer, C.
000138004 700__ $$aGrétillat, M.-A.
000138004 700__ $$0243301$$ade Rooij, N. F.$$g104887
000138004 700__ $$aAnthamatten, O.
000138004 700__ $$aBaettig, R.
000138004 700__ $$aValk, B.
000138004 700__ $$aVogel, P.
000138004 773__ $$jA61$$k3$$q449-454$$tSensors and Actuators
000138004 909C0 $$0252173$$pSAMLAB$$xU10329
000138004 909CO $$ooai:infoscience.tind.io:138004$$particle
000138004 937__ $$aSAMLAB-ARTICLE-1997-014
000138004 973__ $$aOTHER$$rREVIEWED$$sPUBLISHED
000138004 980__ $$aARTICLE