Reliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component
1997
Details
Title
Reliability Considerations for Electrostatic Polysilcion Actuators Using as an Example the Remo-Component
Author(s)
Marxer, C. ; Grétillat, M.-A. ; de Rooij, N. F. ; Anthamatten, O. ; Baettig, R. ; Valk, B. ; Vogel, P.
Published in
Sensors and Actuators A
Volume
61
Issue
3
Pages
449-454
Date
1997
Note
170
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12