Breakdown Mechanisms of Electrostatic Polysilicon Actuators Using as an Example the REMO Component
1996
Details
Title
Breakdown Mechanisms of Electrostatic Polysilicon Actuators Using as an Example the REMO Component
Author(s)
Marxer, C. ; Grétillat, M.-A. ; de Rooij, N. F.
Published in
IEEE/LEOS 1996 Summer Topical Meeting Optical MEMS and their applications
Pages
15-16
Date
1996
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12