Details
Title
Multilayer surface micromachining: microresonators & microrelays.
Author(s)
GRETILLAT, Marc-Alexis
Advisor(s)
Date
1997
Publisher
Université de Neuchâtel
Note
Jury: H.P. Herzig (IMT-UniNE), S.D. Senturia (MIT, Cambridge USA), Ph. D. Harrie et A.C. Tilmans (CPCLARE Corp. Hasselt, B).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12