Infoscience

Thesis

Multilayer surface micromachining: microresonators & microrelays.

    Note:

    Jury: H.P. Herzig (IMT-UniNE), S.D. Senturia (MIT, Cambridge USA), Ph. D. Harrie et A.C. Tilmans (CPCLARE Corp. Hasselt, B).

    Reference

    • SAMLAB-THESIS-1997-002

    Record created on 2009-05-12, modified on 2016-08-08

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