Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors
2006
Details
Title
Remote Electromagnetic Excitation of High-Q Silicon Resonator Sensors
Author(s)
Lucklum, F. ; Jakoby, B. ; Hauptmann, P. ; de Rooij, N. F.
Published in
IEEE International Frequency Control Symposium
Pages
139-144
Date
2006
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12