Integrated and Hybrid Electrostatic Rotary Micromotors based on Silicon Technology.
1996
Details
Title
Integrated and Hybrid Electrostatic Rotary Micromotors based on Silicon Technology.
Author(s)
PARATTE, Lionel
Advisor(s)
Date
1996
Publisher
Université de Neuchâtel
Note
Jury: H. Hügli (IMT-UniNE), E. Bornand (ASULAB, Marin), L.S. Fan (Labo IBM, Almaden, USA).
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Theses
Work outside EPFL
Theses
Record creation date
2009-05-12