Integrated and Hybrid Electrostatic Rotary Micromotors based on Silicon Technology.


Advisor(s):
de Rooij, N. F.
Year:
1996
Publisher:
Université de Neuchâtel
Note:
Jury: H. Hügli (IMT-UniNE), E. Bornand (ASULAB, Marin), L.S. Fan (Labo IBM, Almaden, USA).
Laboratories:




 Record created 2009-05-12, last modified 2018-07-07


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