Infoscience

Thesis

Integrated and Hybrid Electrostatic Rotary Micromotors based on Silicon Technology.

    Note:

    Jury: H. Hügli (IMT-UniNE), E. Bornand (ASULAB, Marin), L.S. Fan (Labo IBM, Almaden, USA).

    Reference

    • SAMLAB-THESIS-1996-002

    Record created on 2009-05-12, modified on 2016-08-08

Fulltext

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