Capacitive Polysilicon Resonator with MOS Detection Circuit
1991
Details
Title
Capacitive Polysilicon Resonator with MOS Detection Circuit
Author(s)
Linder, C. ; Zimmermann, E. ; de Rooij, N. F.
Published in
Sensors and Actuators A
Volume
25-27
Pages
591-595
Date
1991
Note
50
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12