Fertigungsverfahren für die Mikrosystemtechnik [Manufacturing Technologies for Microsystems]
1993
Details
Title
Fertigungsverfahren für die Mikrosystemtechnik [Manufacturing Technologies for Microsystems]
Author(s)
Linder, C. ; de Rooij, N. F. ; Peters, R.-P. ; Unal, N. ; Ruprecht, R.
Published in
tm - Technisches Messen
Volume
60 N°9
Pages
319-328
Date
1993
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12