Details
Title
Werkzeuge der Siliziumtechnologie
Author(s)
Linder, C. ; de Rooij, N. F.
Published in
TR - Technische Rundschau
Pages
8-13
Date
1994
Note
101
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12