Investigations on Free-Standing Polysilicon Beams in View of their Application as Transducers
1990
Details
Title
Investigations on Free-Standing Polysilicon Beams in View of their Application as Transducers
Author(s)
Linder, C. ; de Rooij, N. F.
Published in
Sensors and Actuators A
Volume
21-23
Pages
1053-1059
Date
1990
Note
34
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12