Investigations on Free-Standing Polysilicon Beams in View of their Application as Resonators
1989
Details
Title
Investigations on Free-Standing Polysilicon Beams in View of their Application as Resonators
Author(s)
Linder, C. ; de Rooij, N. F.
Published in
Transducers'89 the 5th International Conference Solid-State Sensors and Actuators
Pages
289-290
Date
1989
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12