Surface Micromachining
1992
Details
Title
Surface Micromachining
Author(s)
Linder, C. ; Paratte, L. ; Grétillat, M.-A. ; Jaecklin, V. P. ; de Rooij, N. F.
Published in
MME'92 Micromechanics Europe Workshop
Pages
43-55
Date
1992
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12