Microsystems Research and Development at IMT Neuchatel - Modelling and Performance of Polysilicon Comb Actuators
1993
Details
Title
Microsystems Research and Development at IMT Neuchatel - Modelling and Performance of Polysilicon Comb Actuators
Author(s)
Linder, C. ; Jaecklin, V. P.
Published in
Journal of Micromachine Society
Volume
6
Issue
1
Pages
107
Date
1993
Note
83
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12