Realization of Different Polysilicon Resonators with Integrated Excitation and Detection Elements
1991
Details
Title
Realization of Different Polysilicon Resonators with Integrated Excitation and Detection Elements
Author(s)
Linder, C. ; Grétillat, M.-A. ; de Rooij, N. F.
Published in
Microelectronic Engineering
Volume
15
Pages
411-414
Date
1991
Note
55
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12