Polysilicon Beams Realized by Surface Micromachining and their Applications as Transducers
1990
Details
Title
Polysilicon Beams Realized by Surface Micromachining and their Applications as Transducers
Author(s)
Linder, C.
Published in
Integrierte Mikrosysteme und ihre Anwendungen
Date
1990
Note
35
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Peer-reviewed publications
Work outside EPFL
Journal Articles
Published
Record creation date
2009-05-12