Fabrication of electrically insulated microchannels in silicon (poster)
2000
Details
Title
Fabrication of electrically insulated microchannels in silicon (poster)
Author(s)
Lichtenberg, J. ; Lammel, G. ; Oulevey, M. ; Verpoorte, E. ; Renaud, P. ; de Rooij, N. F.
Published in
Eurosensors XIV 14th European Conference on Solid-State Transducers
Pages
463-466
Date
2000
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12