conference paper
A high insulating thin film ZnO piezoelectric actuator on a Polyimide substrate
2002
The 16th European Conference on Solid-State Transducers
Type
conference paper
Author(s)
Date Issued
2002
Published in
The 16th European Conference on Solid-State Transducers
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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