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A high insulating thin film ZnO piezoelectric actuator on a Polyimide substrate

Kuoni, A. ; Quinche, C. ; Boillat, M. ; Keppner, H.[...]

Published in:
The 16th European Conference on Solid-State Transducers
Year:
2002
Laboratories:
SAMLAB

Record appears in:
Scientific production and competences > Archives > STI - School of Engineering > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published



 Record created 2009-05-12, last modified 2018-03-17


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