Infoscience

Conference paper

A high insulating thin film ZnO piezoelectric actuator on a Polyimide substrate

Kuoni, A.; Quinche, C.; Boillat, M.; Keppner, H.; de Rooij, N. F.
  • Published in: The 16th European Conference on Solid-State Transducers
  • Publication date: 2002

    Reference

    • SAMLAB-CONF-2002-028

    Record created on 2009-05-12, modified on 2016-08-08

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