Polyimide membrane with ZnO piezoelectric thin film pressure transducers as a differential pressure liquid flow sensor

Fabrication and characterization of ZnO thin film piezoelectric sensors on a polyimide membrane is presented in this paper. As a test device a differential pressure liquid flow sensor has been fabricated. We discuss new material combinations for the fabrication of the test devices. The pressure sensor membrane is a thin polyimide sheet bonded to a silicon wafer and the sensing material is sputtered ZnO piezoelectric thin film. The fabricated liquid flow sensor has been tested with a piezoelectric micropump for flow rates from 30 μl h-1 to 300 μl h-1 . Stroke volumes of 1 to 10 nl have been measured. The strain in the sensing layer has been modeled and a transverse piezoelectric coefficient of e31,f= -0.294 C m-2 has been extracted.


Published in:
Journal of Micromechanics and Microengineering, 13, 4, S103-S107
Year:
2003
ISSN:
09601317
Note:
297
Laboratories:




 Record created 2009-05-12, last modified 2018-03-17


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