Optimized Design and Fabrication Methods for Miniature Piezoresistive Pressure Sensors
1986
Details
Title
Optimized Design and Fabrication Methods for Miniature Piezoresistive Pressure Sensors
Author(s)
Kloeck, B. ; Stauffer, B. ; Scott, D. C. ; de Rooij, N. F.
Published in
Capteurs'86
Pages
74-79
Date
1986
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12