A Novel Four-Electrode Electrochemica Etch-Stop Method for Silicon Membrane Formation
1987
Details
Title
A Novel Four-Electrode Electrochemica Etch-Stop Method for Silicon Membrane Formation
Author(s)
Kloeck, B. ; de Rooij, N. F.
Published in
Transducers'87 the 4th International Conference Solid-State Sensors and Actuators
Pages
116-119
Date
1987
Laboratories
SAMLAB
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > SAMLAB - Sensors, Actuators and Microsystems Laboratory
Work outside EPFL
Conference Papers
Published
Work outside EPFL
Conference Papers
Published
Record creation date
2009-05-12